JPH01110433U - - Google Patents
Info
- Publication number
- JPH01110433U JPH01110433U JP1988004154U JP415488U JPH01110433U JP H01110433 U JPH01110433 U JP H01110433U JP 1988004154 U JP1988004154 U JP 1988004154U JP 415488 U JP415488 U JP 415488U JP H01110433 U JPH01110433 U JP H01110433U
- Authority
- JP
- Japan
- Prior art keywords
- view
- rectangular hole
- semiconductor
- etching mask
- anisotropic etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988004154U JPH079376Y2 (ja) | 1988-01-19 | 1988-01-19 | （１００）面異方性エッチング加工マスク |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988004154U JPH079376Y2 (ja) | 1988-01-19 | 1988-01-19 | （１００）面異方性エッチング加工マスク |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01110433U true JPH01110433U (en]) | 1989-07-26 |
| JPH079376Y2 JPH079376Y2 (ja) | 1995-03-06 |
Family
ID=31206413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988004154U Expired - Lifetime JPH079376Y2 (ja) | 1988-01-19 | 1988-01-19 | （１００）面異方性エッチング加工マスク |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH079376Y2 (en]) |
-
1988
- 1988-01-19 JP JP1988004154U patent/JPH079376Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH079376Y2 (ja) | 1995-03-06 |